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Image Samples

Here is a selection of SEM-images that display the results achieved with the XPG2 Pattern Writing system. Please click on the thumbnail picture to view a larger image.

SEM lithography with Hitachi S4100 SEM

SEM lithography with Hitachi S4100 SEM - Image 1 SEM lithography with Hitachi S4100 SEM - Image 2 SEM lithography with Hitachi S4100 SEM - Image 3 SEM lithography with Hitachi S4100 SEM - Image 4

SEM Lithography with FEI/Philips XL30 FEG

SEM Lithography with FEI/Philips XL30 FEG - Image 1 SEM Lithography with FEI/Philips XL30 FEG - Image 2 SEM Lithography with FEI/Philips XL30 FEG - Image 3 SEM Lithography with FEI/Philips XL30 FEG - Image 4 SEM Lithography with FEI/Philips XL30 FEG - Image 5

EBL Lithography with the Eiko E 100

EBL Lithography with Eiko E 100 - Image 1 EBL Lithography with Eiko E 100 - Image 2 EBL Lithography with Eiko E 100 - Image 3 EBL Lithography with Eiko E 100 - Image 4 EBL Lithography with Eiko E 100 - Image 5 EBL Lithography with Eiko E 100 - Image 6 EBL Lithography with Eiko E 100 - Image 7